Nano Motorized Stage with long-travel range

- Simple interface based on USB connection

- Step motor based long range stage controlled by encoder based driver
- Affordable price:  ~$3,400 (ST1), ~$2,600 (PDV1)
- Reliable performance

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Specification

• Two models: ST1, PDV1 (drawings)

• Supports all combinations: X, XY, and XYZ

• XY model: synchronized for vector scanning

• Minimum Resolution: 10 nm

• Stability: 20 nm (ST1), 60 nm (PDV1)

• Repeatability: 20 nm (ST1), 60 nm (PDV1)

• Travel range: 25 mm (ST1), 30 mm (PDV1)

• Step motor & lead screw type

• Feedback control

• No Backlash - compensated by feedback

• No Creep - eliminated by feedback control

• Feedback control: Microcontroller

• Setting time: <100 ms

 

Features

• USB interface with pc

• Windows application as a Control panel

• User interface through UART standard

• Coding: support all languages (C, C++ C#, python, etc.)

• Serial Commands: Text-based ASCII Commands provided for full control by user application

• No acoustic noise: high performance step motor driver

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Performance

• Encoder 1MHz, 10 nm (by Renishaw)

• Max speed: 600 um/s

• Step motor full step: 0.125 μm

• 256 micro-step

• Scan range: 25 mm x 25 mm x 25 mm

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Application

• Optical experiments

• Lab-made lithography

• Microscopic Mapping experiments

• Alignment for wafer, mask, optics, etc.

• Profilometer

• 3D nano-scanner

• 3D nano-printer