Tube Furnace with Stick Slip Stage

• Automated stage for high-temperature vacuum furnaces

• In situ monitoring: sample stage translational motion

 

Features

• Move in a high-temperature vacuum.

• Maximum speed: 1.2 cm/s.

• Capable of bi-directional operation

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Specification

• Temp Controller: Programmable Controller (FC-1000)

• Sensor: K-type

• Applicable Tube Diameter: φ50 mm

• Heater Capa: 2200 W

• Dimension Hot zone: Length 300 mm

• Dimension (WxDxH): 502x357x517 mm (19.76x14.06x20.35")

• Weight: 27kg

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Performance

• Maximum Speed : 1.2 cm/s

• Max Temp : 1200°C (2192°F)

• Vacuum Capability: Yes

• Operation in Vacuum and High Temperature: Yes

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Application

• in-situ monitoring growth for tube-type CVD

• in-situ monitoring annealing 

• position monitoring and feedback control w/ Lidar sensor

 

Anticipated Outcomes​

• (Process Automation and Productivity Enhancement)
  Precise process execution is enabled without human intervention through transport mechanisms and AI-based control, which improve deposition position control and process repeatability.

• (Synthesis of High-Value-Added Materials)
  Position-controlled movement allows for precise deposition and growth of various materials (e.g., 2D materials, heterojunction structures), contributing to advanced nanomaterial research and mass production.

• (Continuous Processing and Time Reduction)
  Transitioning from conventional static processing to a sample-transport-based continuous deposition process facilitates high-speed operation and large-scale throughput.

• (Establishing an AI-Based Smart Material Processing Platform)
  Real-time process monitoring and learning-based autonomous control technologies enable expansion toward Smart Fab (smart manufacturing) systems.